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Silicon Wafer Silver Coated
Silicon Wafer Silver Coated (4 inches, Single Side Polished)
November 6, 2017
Fine Dust Respirator / Respiratory Protective Equipment
Fine Dust Respirator / Respiratory Protective Equipment
November 6, 2017
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Platinum Coated Silicon Wafer / Platinized Silicon Wafer


Platinum Coated Silicon Wafer / Platinized Silicon Wafer

Platinum Coated Silicon Wafer / Platinized Silicon Wafer
Product No. NRE-8028
CAS 7440-21-3
Diameter 4”
Shape Circular
Grade Prime
Crystal Orientation (Si) <100>
Crystal Orientation (Pt) <111>
Resistivity 1-20 Ω-cm
Surface Single Side Polished, back-side Alkaline etched
Thickness 525±25µm
Coating Platinum Coating
Thickness of Platinum Layer 150-200nm
TTV <10µm
Bow/Warp <40µm
Thermal Oxide Layer Thickness 1,000nm±5% (on both sides)
TiO2 over Oxide over polished side 400 ±50Å
Platinum (Pt) over TiO2, over SiO2, over polished Silicon, by sputtering 2000±50Å
Surface roughness ≤ 5 nm
Temperature stability of Pt Layer 600-650 °C

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