Platinum Coated Silicon Wafer / Platinized Silicon Wafer
| Platinum Coated Silicon Wafer / Platinized Silicon Wafer | |
| Product No. | NRE-44022 |
| CAS | 7440-21-3 |
| Diameter | 4” |
| Shape | Circular |
| Grade | Prime |
| Crystal Orientation (Si) | <100> |
| Crystal Orientation (Pt) | <111> |
| Resistivity | 1-20 Ω-cm |
| Surface | Single Side Polished, back-side Alkaline etched |
| Thickness | 525±25µm |
| Coating | Platinum Coating |
| Thickness of Platinum Layer | 150-200nm |
| TTV | <10µm |
| Bow/Warp | <40µm |
| Thermal Oxide Layer Thickness | 1,000nm±5% (on both sides) |
| TiO2 over Oxide over polished side | 400 ±50Å |
| Platinum (Pt) over TiO2, over SiO2, over polished Silicon, by sputtering | 2000±50Å |
| Surface roughness | ≤ 5 nm |
| Temperature stability of Pt Layer | 600-650 °C |
Platinum Coated Silicon Wafer / Platinized Silicon Wafer
