
Silicon Sputtering Target
Silicon Sputtering Target
Silicon Sputtering Target | |
Product No | NRE-43141-400 |
Purity | 99.999% |
Diameter | 400 mm |
Thickness | 6 mm |
With copper backing plate | |
Purity | 99.9% |
Diameter | 400 mm |
Thickness | 6 mm |
Bonded With | Indium |
Silicon Sputtering Target
Silicon Sputtering Targets are widely used in various industries for thin film deposition due to silicon’s excellent semiconducting properties and compatibility with numerous materials. Here are the key applications of silicon sputtering targets: Silicon Sputtering Target
- Semiconductor Industry
Integrated Circuits (ICs): For deposition of silicon layers in CMOS and MEMS devices.
Transistors & Diodes: Thin film silicon layers form active regions or insulating barriers.
Passivation & Dielectric Layers: Often used as base or interlayer materials.
- Display Technology
Flat Panel Displays (FPD): Used in TFT-LCDs and OLEDs for depositing amorphous silicon (a-Si) or polycrystalline silicon (p-Si).
Touchscreens: Silicon layers help in forming conductive/semiconductive layers in touch sensors.
- Photovoltaics
Solar Cells: Deposition of thin film amorphous or microcrystalline silicon for photovoltaic layers.
Back Reflectors & Barrier Layers: Part of the multilayer architecture in thin-film solar panels.
- Data Storage Devices
Hard Disk Drives (HDDs): Thin silicon films are used in underlayers or protective coatings.
Optical Storage: Silicon can be used in phase-change or rewritable optical media.
- Coatings and Protective Films
Hard Coatings: Silicon layers provide scratch resistance and chemical durability.
Barrier Films: Prevent moisture or gas ingress in packaging or electronic encapsulation.
- Research and Development
Thin Film Research: Used in R&D for new materials, sensors, and nanostructures.
Plasma Etching Studies: Sputtered silicon films are tested for plasma process compatibility.
Specifications Often Tailored For:
Purity (usually ≥ 99.99%)
Doping (e.g., phosphorus or boron)
Form factor (disc, rectangular, bonded with backing plates)
Neuromorphic and Quantum Computing
Memristive Devices: Silicon thin films are used in resistive switching memories (ReRAM) for neuromorphic chips.
Quantum Dots & Qubits: Silicon layers help form structures needed for spin qubits in quantum computing research.