Zirconium Oxide Sputtering Target | |
Product No | NRE-43187 |
CAS No. | 1314-23-4 |
Formula | ZrO2 |
Molecular Weight | 123.22 g/mol |
Thickness | 3 mm ± 0.5mm (can be customized) |
Diameter | 50 mm ± 1mm (can be customized) |
Boiling Point | 4,300° C |
Shape | Round |
Zirconium Oxide Sputtering Target
Introduction:
Zirconium oxide sputtering target also known as zirconia, is a high-performance ceramic material known for its excellent mechanical properties, thermal stability, and chemical resistance. Sputtering targets made from zirconium oxide are used to deposit thin films of ZrO₂ on various substrates through physical vapor deposition (PVD) processes. These films exhibit unique characteristics such as high hardness, low thermal conductivity, and good optical properties, making them suitable for a wide range of applications.
Applications
Optical Coatings: Zirconium oxide is widely used in the production of optical coatings, such as anti-reflective or reflective layers, due to its high refractive index and transparency in the visible and infrared spectrum.
Biomedical Applications: ZrO₂ coatings are biocompatible and are used on dental and orthopedic implants, providing enhanced wear resistance and promoting better integration with bone.
Thermal Barrier Coatings: In aerospace and energy applications, zirconium oxide is employed as a thermal barrier coating (TBC) on turbine blades and combustion chambers, protecting them from high temperatures and improving efficiency.
Electrical Insulation: ZrO₂ films serve as excellent electrical insulators, making them useful in electronic components, capacitors, and insulating layers in semiconductor devices.
Protective Coatings: Due to its hardness and chemical stability, zirconium oxide is used to create protective coatings on tools and machinery, enhancing their durability in harsh environments.
Solid Oxide Fuel Cells (SOFCs): Zirconium oxide can be used as an electrolyte in solid oxide fuel cells, contributing to improved ionic conductivity and overall cell performance.
Catalytic Applications: ZrO₂ can act as a support for catalysts in various chemical reactions, enhancing their activity and stability.